6620.1:
High-Temperature Cantilever Sensor based on Nanostructured and Nanoparticle doped Ceramics; Fundamental, Inter-Institutional, Multidisciplinary Research Approach (Project of the Innovation Committee TOP NANO 21)
Abstract
The project has the objective to design and manufacture nano-structured micrometer scale prototype bi-ceramic temperature cantilever sensors based on the bending of a bi-morph, nano-particle doped, ceramic cantilever and a capacitance detection principle.
The challenge of the project is the development of suitable ceramic materials for temperature sensing which will resist degradation in the harsh high temperature environment of a fossile fuel-based energy production system. A further goal is the development of a suitable microfabrication and assembly technique of the miniature sensors to be used in e.g. micro-reactors.