| 4785.2 | Monsieur Prof. Dr. Philippe Renaud
Ecole Polytechnique Fédérale de Lausanne Institut de Microsystèmes
BM-Ecublens
1015 Lausanne
Tel.: 021 693 25 96
Fax: 021 693 59 50
e-mail: philippe.renaud@epfl.ch
http://lmis4.epfl.ch/ | High aspect ratio, deep sub-micrometer patterning of polymers with high energy ion beams
Short description | Nanostructuring |