4648.1:
Fast actuators for quality control AFM
Abstract
The goal of the final project is the development of a scanning force micro-scope (SFM) for high throughput quality control. This new SFM is foreseen to be integrated into a fabrication tool, such as a cluster tool.
A key feature of the future quality control SFM will be an integrated, fast actuator for controlling sample to probe separation at nanoscopic dimensions and for exiting the cantilever at its resonance for dynamic mode operation. Thermal actuators can be fabricated in a very cost effective way. Standard design bimorph structures, however proofed to be too slow for direct SFM-feedback. The goal of the present feasibility study is to improve the response time of thermal actuators and to study alternatives based e.g. on PZT for low-voltage operation.