5764.1:
New efficient diesel gas sensors combining nanopowder ceramics and micromachined silicon dice
Abstract
This project with LPI and MiCS, will focus on the development of new high performance gas sensors. Their approach is based on the deposition of WO3 nanoparticles on micromachined silicon substrates. Nanoparticles will bring high sensitivity by maximizing the surface to mass ratio. The integration of the WO3 layer on the silicon microhotplate will result in high performance gas sensors to detect "diesel exhaust pollution". Such sensors are in high demand by car manufacturers to improve the air quality in the passenger cabin. This technology will allow MiCS to offer superior solutions in this fast growing market and thus to strengthen its position in the European gas sensor field.