5147.1:
Scanning Probe Microscope, Actively Stabilized
Abstract
An auxiliary sensor mounted in the head of an SPM side-by-side with the SPM probe tip converts the SPM into a differential topographic microscope. An auxiliary actuator stabilizes the distance between SPM head and sample by feedback from the auxiliary sensor signal.
Auxiliary distance sensing, actuating and feedback circuitry reduces the notorious sensitivity of SPMs to vibrations significantly. This is of particular relevance for SPMs designed for large sample size (silicon wafers, for instance).