5705.2:
Microcontroller-Based 10-Cantilever Parallel Scanning AFM
Abstract
The performance potential of a microcontroller-based parallel scanning AFM will be assessed. The main goal of the feasibility study is the performance comparison of the new system having 10 simultaneously working cantilevers with present single-cantilever systems. Dynamic characteristics, such as maximum scanning speed, maximum switching speed from cantilever to cantilever will be investigated.
At the Physical Electronics Laboratory (PEL), a CMOS-based 10-cantilever force sensor array has been developed, which is currently only operated in a serial mode, one cantilever records an image at a time . The nanosystem combines on a single CMOS chip ten cantilevers with thermal actuation and piezoresistive detection elements, and signal driving and conditioning circuitry. Possible applications areas are parallel scanning AFM and surface analysis by recording force-distance curves.
To explore the above characteristics and demonstrate the full functionality of the force sensor array (incl. true parallel scanning of areas with up to 1.1 mm width), a microprocessor-controlled demonstration system will be built.