5441.2:
Focused Electron Beam Induced Deposition of Magnetic Supertips and Super-Hard High Aspect Ratio Diamond Supertips for Scanning Probe Microscopes
Abstract
The objective of this 2 years project continuation comprises the fabrication of high-resolution magnetic supertips and super-hard high aspect ratio diamond supertips on top of commercially available scanning probe tips by means of focused electron beam induced deposition (FEB). During the preceding 9 months feasibility study our first FEB deposited magnetic supertips (apex radius: 30nm, aspect ratio: 10) were proven to result in magnetic force microscopy images. We now envisage pushing the resolution of our magnetic supertips to <10nm needed for future’s ultrahigh magnetic density data storage by depositing magnetic nanocrystals (Ni, Co, Fe) with different sizes (2…10nm in diameter) in a stabilizing embedding matrix on the apex of scanning probe tips. Additionally, we challenge FEB deposition of high aspect ratio diamond supertips and local diamond tip coatings. Due to the local deposition inherent to FEB undesired strains bending the cantilevers can be avoided a priori. Specially suited precursors for deposition and reactive ambient gases will be investigated, deposition parameters will be optimized, and a deposition model will be developed. A transfer of scientific results into commercial products is envisaged.