4775.2:
NanoCAS (Nanomechanical Cantilever Array Sensors)
Abstract
The aim of this project is to apply the already developped nanomechanical sensor system in a field study together with industrial partners to explore customer application ranges. We provide a portable and compact measurement setup that will be refined to be a product for industrial use. The field study together with Balzers and Leybold Instrumentation (BLI, Balzers) aims to apply NCAS to monitor the effectiveness of plasma cleaning processes in wafer processing lines.