5203.2:
Positioning and Sensing with Scanning Probe and Nanometric Scale Reference
Abstract
Nanometer position sensing is demanded in various fields. We propose a new method based on scanning probe microscopy and a lattice for nanometric scale reference. In a first step a resolution of a few nm for a range of a few mm is aimed at. The advantages of this method as compared to interferometer are compactness, local measurement, no heating and combination of several degrees of freedom. For larger working range, artificial gratings could also be used. This measurement system will be integrated and tested in a piezoelectric monolithic x-y stage (range of few tens of microns). In addition, it will be used to calibrate parallel micromanipulators (range of few mm) developed in the TopNano projects CTI P-No: 4594.1 and 4596.1. Application fields of the measurement system are Microscopy, Metrology, Lifescience, Nanofactory, etc.