4919.2:
Silicon based ionization micro-devices for gas detection and identification
Abstract
We propose here the development of a new type of gas sensor based on ionization of molecules, followed by mass filtering and detection. These devices are true nano-scale ionizers that exploit sub-micron-scale physics.
The project is a collaboration of groups at the EPFL and industrial partners who are interested in small, inexpensive gas sensors which do not require the high selectivity of macro-scale laboratory instruments. Our sensors will be general in their applicability, unlike existing solid state and optical sensors that are highly species specific.
This project concerns a 12 month feasibility study to demonstrate that it is possible to make a micro-ionizer with nanometer features for direct field ionization of the gas. This device will then be the key component for further investigations to make a microminiature silicon mass spectrometer (total current, ion mobility or electromagntic separation).