7027.1:
Theoretical study of calibration of ultra-high precision robots for nanofactory (Project of the TOP NANO 21 Innovation Committee)
Abstract
Nowadays, new parallel robot concepts for ultra-high precision positioning and suitable for nano-factory applications were designed and realized.
The use of flexible bearings, without clearance, nor friction, permits high position repeatability and reliability.
In nano-factory applications, some operations require high degree of repeatability (5 nm in 1D and 20 nm in 3D) and medium average accuracy (few microns), however machining process may require absolute accuracy in the magnitude of 100 nm for 5 mm length stroke.
To achieve such a degree of performance, it becomes essential to control all the parameters that may influence the result (thermal stability, machining accuracy of bearings, effect of flexible structures, load effect (charge) by means of analytical methods as modeling, simulation and calibration methods.
The scope of this project is the establishment of theoretical basis for calibration of ultra high precision robots.