4798.2:
Ceramic microsensor array with nanocrystalline tin oxide for gas detection
Abstract
The aim of this project is the fabrication of miniaturized arrays of gas sensors made of nanocristalline tin oxide. Nanopowders have the advantage of a much better sensitivity than powders with larger grain sizes. We intend to scale down the sensor components to 10x10microm2 and to integrate many of them on a single chip. By applying individual dopant concentration to every single sensor dot, each of them has a slightly different sensitivity range. The combined selectivity of the whole array is much better than the one of a single sensor. The developed sensor array has the potential to be used for the analysis of hot gases in exhaust streams and for gas monitoring security devices.