5393.1:
3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines
Abstract
Metrology laboratories are facing an increasing demand for high precision calibration services. New solutions for measuring 3D probes must be proposed to obtain the required resolution of 5 nm with repeatability better than 20 nm.
The proposed solution must comply with the standards presently use in metrology. Therefore, the measuring 3D touch probe will use a small probing sphere (0.2 mm or even 0.1 mm in diameter) and apply very small probing forces (which will be extrapolated to zero force). The ease of use of the probe will also be an important issue.
At the end of the project, a demonstrator will have been realized, tested and characterized. These results will provide the necessary knowledge to start the development of the industrial probe in cooperation with industry.