5697.3:
Surface inspection system for industrial applications
Abstract
The present project aims at developing a new generation of atomic force microscopes with a new resolution/stroke range. A strongly enlarged range opens completely new application areas such as surface roughness characterization with high resolution. This work exploits recent advances in flexible structures and aims at using these results by putting emphasis on control issues. It is the belief of the project partners that only a development which simultaneously takes care of mechanical issues, of actuators, sensors and of the control issues can lead to a successful realization of a challenging system with nanometer resolution over a millimeter stroke.