6221.1:
A Highly Parallel Method for the Production of Carbon Nanotube AFM Tips
Abstract
It has been demonstrated that carbon nanotubes mounted on AFM tips considerably improve the performance of traditional tips, mainly because of their small apex radius and large aspect ratio, but also because of their mechanical properties, which substantially enhance the lifetime of the probe. However, controlled, large-scale production of AFM probes tipped with individual, oriented carbon nanotubes has not been accomplished today. If a reliable technology were available for growing individual carbon nanotubes in parallel on all AFM probes of an entire wafer, these probes would become affordable for the large pool of AFM users worldwide. It is the objective of this feasibility study to evaluate the potential of growing oriented carbon nanotubes of controlled length on arrays of tips sputter coated with a thin film of catalyst in the presence of an electric field.