4647.1:
Reversible interconnections for quality control AFM
Abstract
The ultimate goal of the project is the development of a scanning force microscope (SFM) for high-throughput quality control. The new SFM will be integrated in a fabrication tool, such as a cluster tool.
Within the current feasibility study, possible interconnection schemes between the nanosystem, i.e., a cantilever array with on-chip sensing and actuation structures, as well as signal conditioning circuitry, and the outside world will be investigated. Upon failure, the nanosystem must be easily replacible by the operator. Therefore, classical interconnection by means of wire bonding is not feasible. Instead, we propose to develop new interconnection schemes, which are self-aligning and reversible without reducing the reliability. While the techniques investigated in this feasibility study will be directly applied to the development of a scanning force microscope for high throughput quality control, they are in general applicable to connect nanosystems to the outside world.