4596.1:
Nanofactory: Ultra high precision parallel manipulator family with 3 to 6 degrees of freedom
Abstract
Today, most of the micro-assembly and micro-manipulation stations are based on the combination of different 1 degree of freedom (DOF) modules. These modules are often stacked to hold large workspaces. These classical configurations present the advantage of being modular and decoupled, but they suffer from a lack of precision and stiffness. Hence, they cannot be used for manipulators working with resolutions of a few nanometers. The state of the art solutions which are driven by piezoelectric actuators have a limited work volume (generally less than 100 microns motion ranges). The goal of this project is to conceive a very high precision parallel manipulators family with 3 to 6 degrees of freedom having a resolution of a few nanometers and a work zone of the order of 1 to 2cm3. Flexible bearings will be used to ensure a high rigidity, no play and no hysteresis. To make possible the use of these manipulators in the small and confined volume of a nanofactory, the overall bulkiness will be limited to a few dm3. A catalogue describing 10 to 15 generic kinematics and a systematic designing method will allow to design a manipulator fulfilling specific industrial requirements in a few days. A concrete industrial application will be chosen as a key example to direct the project.