4594.1:
Nanofactory: Ultra high precision electrodischarge machine (EDM) of small size
Abstract
Today's EDM machines (die sinking or wire) are mainly used to produce manufacturing tools, but there is an increasing demand for the direct manufacturing of small and very precise pieces. The actual EDM machines are not well adapted to this type of production because they are not precise enough, are bulky, have relatively low mechanical frequencies, and use large amounts of dielectric liquid.
The first phase of the project consists in designing a small die sinking EDM machine having 3 translational degrees of freedom (DOF), a workspace of 2 to 3cm3 and a linear resolution of 10nm. In the second phase of the project, 2 rotational DOF will be added. They will have an angular motion range of 5° and a resolution of 2 microradians. A parallel kinematics structure articulated with flexible bearings will be used to ensure the high rigidity and dynamical properties required for that precision. The electrical generator will be derived from an existing one (Agie) for the first tests.