5737.2:
Nanofactory: Ultra high precision parallel manipulators family with 3 to 6 degrees of freedom
Abstract
The first part of this project enabled us to achieve the following results: proposal of more than 30 solutions concepts for parallel manipulators with 3 to 6 degrees of freedom (DOF); detailed design for 3 new manipulators with 4, 5 and 6 DOF (the last one, called Sigma 6, will probably be protected by a patent).
Realization of a first prototype of the Sigma 6 robot; design, realization and thorough testing of 2 different translation stages with 1 DOF using flexure hinges, allowing us to point out the limits in resolution and precision for the first one based on a direct drive actuator as well as for the second one based on a ball screw transmission; a repeatability of 5 nm has been achieved on the linear stage.
The project continuation has the following goals: 1) static and dynamical characterization of the Sigma 6 robot and 2) its optimization; the aimed resolutions are 3 nm and 100 nanoradians.