6210.2:
Smart Sensors (Part I)
Abstract
The objective is to develop novel, smart sensors for applications in the field of electronic noses. Thin films of compliant material, such as polymer layers, are deposited on cantilevers. Electrodes on top of these compliant layers are connected to measure the electrical properties of these layers under mechanical deformation. Due to the change of thickness, the capacitance and the conductance is detected.