6157.2:
NanoReX: Chemical modification of surfaces for nanoreplication
Abstract
Replication will become a key technology in the industrial production of nanostructures on surfaces. Coatings play an important role in tool life time and replication fidelity. The effects of surface coatings on the quality of nanostructures in replication processes will be studied. Anti-adhesive layers on replication stamps as well as functional coatings on devices will be examined using XPS, contact angle measurements and Lateral Force Microscopy. The project is oriented towards fundamental understanding of coatings and procedures and will have a direct impact on different projects using replication methods.
This supplement to the TopNano21 project NanoRep is linked to series of other Top Nano 21 projects dealing with replication technology.