6989.1:
Manipulating Microscale Objects with Nanoscale Precision (Project of the Innovation Committee TOP NANO 21)
Abstract
Many efforts in both the research and commercial development of micro and nano technologies require systems capable of complex manipulation of individual micron-sized objects with nanometer precision. This research project will develop such a system by integrating microfabricated grippers and gripper arrays, gripper surface chemistry science, ultrasonic object manipulation for localizing and possibly sorting micro/nano objects, and high-precision positioning with nanometer resolution. Although many microgrippers have been proposed and built by researchers around the world, no effort has effectively integrated microgripping, part localization, and nanopositioning technologies into a system with economic viability. This project will emphasize system integration aspects to achieve this goal.