5968.1:
Characterization of photo-plastics in view of full-wafer microfabrication of low cost scanning probe microscopy sensors
Abstract
Photo-plastics are of high potential for the fabrication of molded, low-cost scanning probe microscope sensors.
One key feature of a commercially valuable batch fabrication process of such probes is that as many of them as possible can be handled together, e.g. by connecting them via a frame.
For that purpose we will investigate the stress in large photo-plastic structures. We want to assess the maximal, stress-limited structure-size and explore stress-relieve structures. Also adhesion, de-molding and optical properties of these structures will be studied.