6030.3:
GRAting Nanostructure fabrication Technology GRANT
Abstract
The GRANT project is a Technological Fundamental Project which will develop technology and basic know-how for the fabrication and production of large area grating nanostructures with typical linewidths in the range 50 - 100 nm and periodicities down to 150 nm. The project will enable the basic grating fabrication to be studied and optimised, and is focused towards being able to produce such grating nanostructure in a high fidelity, large area format which can serve as the original for subsequent mass production by replication processes such as hot embossing and injection moulding.